High-Purity Disilane Gas for Semiconductor Manufacturing

Our Disilane product is produced using advanced preparation processes, ensuring high purity and stability. Through precisely controlled thermal decomposition or silane feed gas methods, we can manufacture Disilane gas that meets stringent industry standards. This product excels in PECVD, LPCVD, and other manufacturing processes, effectively enhancing the performance and reliability of the products.

Please note that Disilane is flammable and can self-ignite in contact with air, possibly forming explosive mixtures with air. Therefore, during use and storage, it is essential to strictly comply with relevant safety regulations and take appropriate personal protective measures to ensure the safety and health of the operators.

Our Disilane product not only conforms to the CAS Registry Number 1590-87-0 and the EINECS Registry Number 216-466-5 but also undergoes rigorous quality control to ensure the quality and consistency of each batch. We are committed to providing customers with high-quality, safe, and reliable Disilane products to meet the growing market demands.

Product Specifications:‌

• Chemical Formula:‌ H6Si2
• Appearance:‌ Colorless transparent gas with a stimulating odor
• Melting Point:‌ -132°C
• Boiling Point:‌ -14.5°C (±9.0°C at 760 mmHg)
• Density:‌ 0.686 g/cm³
• Hazards:‌ Flammable (F), Harmful (Xn)
• Risk Phrases:‌ R17 (Highly flammable), R42 (May cause sensitization by inhalation), R20/21 (Harmful by inhalation or in contact with skin), R36/37/38 (Irritating to eyes, respiratory system, and skin)